홈 > 제품소개 > 반도체분야
반도체분야 NPICS는 항상 여러분 곁에
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  • Our spray nozzle is a precision device that can lead to small BPs travelling at high velocities. When we used appropriately uniform size and velocity of the BPs that were obtained by optimizing the nozzle, the nano-sized contaminants were perfectly controlled.
  • Room temperature process (RTP)
  • World best cleaning performance (down to 10nm)
  • Small and Simple: Easily possible to install in anywhere, any device.
 
  • Multiple(Array) nozzles are high performance devices for wide cleaning zone.
  • Same spec as SSN
용도 나노급 오염물 세정
입자빔 생성가스 Argon, Nitrogen, Carbon Dioxide
캐리어 가스 Helium
특성 저온/상온, 진공/상압 프로세스
제거성능 10~1000nm 오염물
규격 Single Spray Nozzle A Type : 10 X 10 X 100mm
B Type : 20 X 20 X 100mm
C Type : 30 X 30 X 150mm
Multiple Spray Nozzle Depending on the SSN quantity